Nanolab

UCLA
Capabilities
  • Nova 600 Specification
  • 1.1 nm SEM Resolution
  • 10 nm FIB Resolution
  • Pt, W, and C Deposition
  • 5-axis Stage w/ 150 mm Travel
  • Wafer Handling Up To 6"
Procedures
  • TEM Sample Preparation
  • Cross-Sectional Imaging
  • Nanoscale Patterning
  • Basic Circuit Edits
  • Material Deposition
  • XeF2 Enhanced Etching

Hair. Courtesy of Dr. Ioanna Kakoulli.

Contact

Noah Bodzin
nbodzin@seas.ucla.edu

Sergey Prikhodko
sergey@seas.ucla.edu

Articles

Sn solder. Courtesy of Luhua Xu and Shih-Wei Liang.

Nova 600 SEM/FIB System

A State-of-the-Art Nanofabrication Tool

  • Open to all academic and industry clients
  • Currently located in Knudsen A-142
  • Operated by highly skilled engineers
  • Training is available for frequent clients
  • Demo sessions available
  • Account Authorization Form
Nova600