UCLA Nanolab Mask Shop

General Information

The Nanolab offers photo-mask shop services to both academy and industry customers. The masks we provide are suitable for direct-contact photolithography using a Mask Aligner such as Karl Suss MA6. The photomasks are exposed with a Heidelberg DW66 laser writer and developed, etch, and packaged in our own facility.

• Mask Turn-Around Time:  This strongly depends on the queue for masks and the number of masks requested. For the past two years, we have had an average turnaround time of about 1.5 business days per individual mask after the file is accepted. Also, the mask writer is put offline a few days every three months for a routine laser power readjustment and calibration. Check with the staff in regards to the status of the mask queue and the status of the machine.

For masks that are to be shipped by either FedEx or UPS, add at least one more business day. The extra time depends on the shipping carrier.

• Cost of Mask: to estimate the cost of the mask, the extents of the pattern have to be specified. The extents are the X and Y dimensions of a rectangle that completely covers all the features of the pattern of the mask. Once you have these dimensions, use the calculator below (currently under construction) to obtain the cost of the mask:

Pattern Extents X = [user input] Y = [user input]   Write Time = [calculated] 

Academic Rate = [calculated]

Industry Rate = [calculated]

• Critical Dimensions Specifications: The current spec for the critical dimensions is 3 micron with a 0.2 micron tolerance. The CD can be pushed down to 2 micron, but results depend strongly on the layout and are not guaranteed.

• Available Plates: We currently have Chrome Soda/Lime Masks and the available sizes are 4inch, 5inch, and 6inch (maximum 6 inch). We DO NOT supply Iron Oxide masks and there is currently no plan to have that kind of masks available in the near future. If you need Iron Oxide, please contact other mask shops.

• Mask File Acceptable Formats: Either CIF of GDSII formats are preferred. DXF is also acceptable, but please verify the pattern with the staff before submitting it as we have found incompatibility problems. Click here for common issues and solutions for CAD files.

Ordering Masks from UCLA Nanolab

1. Complete a NRF Mask Fabrication Submission Form for each mask layer. Make sure that you have the latest version of the submission form. Fill out one form per mask ordered.

2. Mask filenames may not contain spaces or any other special characters. Underscore bar and dashes are OK.

3. Email the submission form(s) and the mask file(s) to Ivan Alvarado (ialva@ee.ucla.edu), Joe Zendejas (zendejas@ee.ucla.edu), or Steve Franz (franz@nanolab.ucla.edu). You can also drop the submission form and the mask file at the Nanolab office.

Mask Pick Up and Inspection

1. The mask can be picked up from the mask pick up table located to the left as you enter the Mask Writer room. Outside customers will get their mask shipped by the carrier of their choice at an extra charge. Provide account number for carrier, if available.

2. It is the user’s responsibility to inspect the mask for errors immediately after receiving it. If there is any error on our side, we will remake the mask at no extra charge. This policy is void if the mask has already been used on the aligner or more than five days have passed after mask pickup.