Nanolab
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Full Service Facility

Open to all academic and industry users. It is operated by highly skilled Nanolab engineers although training is available for frequent clients.

wafer holder

pdf Account Authorization Form

Contact
Noah Bodzin
310-983-3312
nbodzin@seas.ucla.edu
Engineering V, Room 1129
Articles
Nova 600 SEM/FIB System

The Nova 600 is a state-of-the-art nanofabrication tool used for TEM sample preparation, failure analysis applications and providing top-rate SEM imaging.

Capabilities

  • Nova 600 Specification
  • 1.1 nm SEM Resolution
  • 10 nm FIB Resolution
  • Pt, W, and C Deposition
  • 5-axis Stage with 150 mm Travel
  • Wafer Handling Up To 6"

Procedures

  • TEM Sample Preparation
  • Cross-Sectional Imaging
  • Nanoscale Patterning
  • Basic Circuit Edits
  • Material Deposition
  • High Resolution SEM Imaging

TEM Samples

  • Produced by Nanolab staff.
  • Final thickness of 50-100 nm.
  • Flat fee per sample.
  • TEM grid and all consumables included in fee.

TEM Services