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NanoLab

Top-tier technology made available to the UCLA community and beyond.
Deposition Oxidation – Tystar – Tube 1

Deposition Oxidation – Tystar – Tube 1

Deposition Oxidation – Tystar Tytan 3600 – Tube 2

Deposition Oxidation – Tystar Tytan 3600 – Tube 2

Deposition LPCVD Nitride Low Stress – Tystar -Tube 2

Deposition LPCVD Nitride Low Stress – Tystar -Tube 2

CHA Solution E-Beam Evaporator

CHA Solution E-Beam Evaporator

Deposition PECVD – BMR Technology

Deposition PECVD – BMR Technology

CHA Mark 40 Evaporator (old)

CHA Mark 40 Evaporator (old)

CHA Mark 40 Evaporator (new)

CHA Mark 40 Evaporator (new)

Deposition – CVC 601 Sputterer

Deposition – CVC 601 Sputterer

Denton Desk II Deposition Sputter

Denton Desk II Deposition Sputter

Denton Desk V Thin Film Deposition System

Denton Desk V Thin Film Deposition System

Denton Discovery Sputterer

Denton Discovery Sputterer

Ultratech Fiji – Atomic Layer Deposition

Ultratech Fiji – Atomic Layer Deposition

Deposition LPCVD Tystar Titan II – Tube 4

Deposition LPCVD Tystar Titan II – Tube 4

Deposition LPCVD Nitride/Poly/LTO

Deposition LPCVD Nitride/Poly/LTO

Deposition LPCVD Polysilicon – Tystar Tube 3

Deposition LPCVD Polysilicon – Tystar Tube 3

Deposition LPCVD Nitride – Tystar Tube 2

Deposition LPCVD Nitride – Tystar Tube 2

Deposition PECVD – Plasma Therm 790

Deposition PECVD – Plasma Therm 790

Polifab STS Multiplex CVD Deposition System

Polifab STS Multiplex CVD Deposition System

Ultratech Savannah Atomic Layer Deposition

Ultratech Savannah Atomic Layer Deposition

SCS PDS 2010  Parylene Deposition

SCS PDS 2010 Parylene Deposition

Sloan E-Beam Evaporator

Sloan E-Beam Evaporator

Deposition Oxidation – Tystar Tytan 3600 – Tube 1

Deposition Oxidation – Tystar Tytan 3600 – Tube 1

Ulvac JSP 8000 Metal Deposition Sputter

Ulvac JSP 8000 Metal Deposition Sputter