Equipment List

Full list and descriptions of our available in-lab equipment

Equipment and lab usage rates can be obtained by contacting Steve Franz. Please be sure to specify whether you are from industry, UCLA, or non-UCLA academia.

For more detailed information regarding equipment training, reservation and staff support, please see our Equipment Portfolio Page.

  1. Lithography
    1. JEOL JSM-6610 Scanning Electron Microscope
    2. ASML PAS 5500/200 – Stepper
    3. Headway Spin Coater
    4. Heidelberg DWL 66 LaserWriter
    5. HF-Buffered Oxide Etch
    6. Karl Suss MA6 Aligner
    7. Nitrogen-Purged Muffle Furnace
    8. SVG 8800 Tack Coater & Developer
    9. Raith EBPG 5000+ES - Electron Beam Writer
  2. Deposition
    1. CHA Mark 40 Evaporator
    2. CHA Solution E-Beam Evaporator
    3. Deposition Oxidation - Tystar Tytan 3600
    4. Deposition Oxidation - Tystar
    5. Deposition LPCVD Nitride Low Stress - Tystar
    6. Deposition LPCVD Tystar Titan II
    7. Deposition LPCVD Nitride/Poly/LTO
    8. Deposition LPCVD Nitride
    9. Deposition PECVD - Plasma Therm 790
    10. Deposition PECVD BMR Technology
    11. Deposition - CVC 601 Sputterer
    12. Denton Desk II Deposition Sputterer
    13. Denton Desk V Thin Film Deposition System
    14. Denton Discovery Sputterer
    15. Ultratech Fiji - Atomic Layer Deposition
    16. Polifab STS Multiplex CVD Deposition System
    17. Ultratech Savannah Atomic Layer Deposition
    18. SCS PDS 2010 Parylene Deposition
  3. Etching
    1. Plasma Therm SLR 770 ICP - Chloride Etcher
    2. STS AOE Advcanced Oxide Etcher
    3. HF Vapor Etcher
    4. Matrix 105
    5. Oxford Plasmalab 80 Plus
    6. Plasma Etch PE-100 Plasma System
    7. Plasma -Therm FDRIE DSE III
    8. Porous Si Etcher
    9. Technics Micro-RIE Series 800
    10. Tegal Plasmaline  515 Photoresist Asher
    11. Ulvac NE-550 Chlorine Etcher
    12. Ulvac NLD-570 Oxide Etcher
    13. Unaxis DRIE
    14. Xiatix Xenon Difluoride Etching System
  4. Measurement
    1. AST Goniometer
    2. CDE ResMap
    3. Dektak 6 Surface Profile Measuring System
    4. Vecco Dektak 8 Profilometer
    5. EDAX Genesis
    6. FEI Nova 600 Nanolab DualBeam SEM/FIB
    7. Hitachi S4700 SEM
    8. Jeol 7500F - Field Emission Scanning Electron Microscope
    9. Leica DM2500 Microscope
    10. M&M Probe Station
    11. Nanometrics Nanospec 210/2100 Thin Film Measuring System
    12. Measurment Microscopes
    13. Prometrix Omnimap RS35C
    14. SCI Filmtek 2000
    15. Sopra GES5 Elipsometer
    16. Tencor Flexus 2320A Stress Tester
    17. ULVAC UNECS-2000 Elipsometer
    18. Vecco Dektak 150 Surface Profiler
    19. Vecco Dilnnova Atomic Force Microscope
    20. Wyko NT3300 Optical Profiler
  5. Thermal
    1. YES LPIII - HMDS Thermal Oven
    2. Tystar Therm Anneal
    3. Carbolite High Temperature Oven
    4. Modular Process Technology RTP 650
    5. Modular Process Technology RTP-600xp
    6. VWR Vacuum Oven
    7. YES-LPIII Vacuum Oven
  6. Chemical
    1. Chemical Wet Benches (CNSI)
    2. Chemical Wet Benches (E-IV)
    3. SemiTool Spin Rinse Dryer
  7. Backend
    1. LogiTech CDP
    2. Fusion UV Systems
    3. G&P Technology Poli 400L
    4. Jelight UV Cleaner
    5. Karl Suss SB8 Wafer Bonder
    6. Logitech PM5 Polisher/Grinder
    7. Loomis LSD-100
    8. Tousimis 915B Critical Point Dryer
  8. Miscellaneous
    1. Z-Test Software