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NanoLab

Top-tier technology made available to the UCLA community and beyond.

Etching

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PlasmaTherm SLR 770 ICP – Chlorine Etcher

PlasmaTherm SLR 770 ICP – Chlorine Etcher

Engineering Site, Etching

STS AOE Advanced Oxide Etcher

STS AOE Advanced Oxide Etcher

Engineering Site, Etching

HF Vapor Etcher

HF Vapor Etcher

Engineering Site, Etching

Matrix 105

Matrix 105

CNSI Site, Engineering Site, Etching

Oxford Plasmalab 80 Plus

Oxford Plasmalab 80 Plus

CNSI Site, Etching

Plasma Etch PE-100 Plasma System

Plasma Etch PE-100 Plasma System

CNSI Site, Etching

Plasma-Therm FDRIE DSE III

Plasma-Therm FDRIE DSE III

Engineering Site, Etching

Porous Si Etcher

Porous Si Etcher

Engineering Site, Etching

Technics Micro-RIE Series 800

Technics Micro-RIE Series 800

Engineering Site, Etching

Tegal Plasmaline 515 Photoresist Asher

Tegal Plasmaline 515 Photoresist Asher

Engineering Site, Etching

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UCLA Nanolab

Engineering IV Site
420 Westwood Plaza
14-131A Engineering IV
Los Angeles, CA 90095
Tel: (310) 206-8923
Fax: (310) 206-0148
CNSI Site
570 Westwood Plaza
A216, California NanoSystems Institute
Los Angeles, CA 90095
Tel: (310) 863-3331

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