NanoLabTop-tier technology made available to the UCLA community and beyond. Lithography Back to equipment list >> JEOL JSM-6610 Scanning Electron MicroscopeCNSI Site, Lithography ASML PAS 5500/200 – StepperCNSI Site, Lithography Headway Spin CoaterCNSI Site, Engineering Site, Lithography Heidelberg DWL 66 LaserWriterEngineering Site, Lithography HF-Buffered Oxide EtchEngineering Site, Lithography Karl Suss MA6 AlignerCNSI Site, Engineering Site, Lithography Nitrogen-Purged Muffle FurnaceLithography SVG 8800 Track Coater & DeveloperCNSI Site, Lithography Raith EBPG 5000+ES – Electron Beam WriterCNSI Site, Lithography
