Focused Ion Beam / Scanning Electron Microscope
The Nova 600 is a state-of-the-art nanofabrication tool used for TEM sample preparation, failure analysis applications and providing top-rate SEM imaging. Assisted usage by a skilled Nanolab engineer as well as training for self usage is available for both academic and industry clients.
- TEM Sample Preparation
- Cross-Sectional Imaging
- Nanoscale Patterning
- Basic Circuit Edits
- Material Deposition
- High Resolution SEM Imaging
- Nova 600 specification
- Pt, W, and C deposition
- 5-axis stage with 150 mm travel
- Wafers up to 6″
Contact
Noah Bodzin
310-983-3312
nbodzin@seas.ucla.edu
Engineering V, Room 1129