NanoLab Equipment
Equipment Category – Lithography
ASML PAS 5500/200 – Stepper
Location: CNSI Site | Back to Equipment >>
The PAS 5500/350C is a Deep UV stepper for 0.15-μm applications and beyond. The high
productivity and low cost of ownership allow capacity extensions in existing DUV stepper fabs as
well. The PAS 5500/350C system provides a very cost-effective mix-and-match lithography solution
when used in conjunction with other ASML PAS 5500 i-line and DUV steppers.
productivity and low cost of ownership allow capacity extensions in existing DUV stepper fabs as
well. The PAS 5500/350C system provides a very cost-effective mix-and-match lithography solution
when used in conjunction with other ASML PAS 5500 i-line and DUV steppers.
Additional Information
- Staff Contact
- Lorna Tokunaga
- lorna@cnsi.ucla.edu
- 310.983.3257
- Trainings Required: 2