NanoLab Equipment

Equipment Category – Lithography

ASML PAS 5500/200 – Stepper

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The PAS 5500/350C is a Deep UV stepper for 0.15-μm applications and beyond. The high
productivity and low cost of ownership allow capacity extensions in existing DUV stepper fabs as
well. The PAS 5500/350C system provides a very cost-effective mix-and-match lithography solution
when used in conjunction with other ASML PAS 5500 i-line and DUV steppers.
Additional Information