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Equipment- Measurement

VEECO DI 3100 Atomic Force Microscope

Location: Engineering Cleanroom | Back to Equipment >>

The VEECO DI 3100 Atomic Force Microscope is a high resolution scanning probe microscope with resolution on the order of sub nanometer. The Atomic Force Microscope consists of a cantilever with a sharp tip used to scan the surface of a sample. This instrument is capable of measuring specimen’s horizontal and vertical resolutions down to a fraction of a nanometer. The AFM can be used to characterize rough surfaces, characterize patterns for lithography structures, perform characterization of polymers and other biomaterials, as well as conducting nanomanipulations and nanolithography. 


  • Sample size:  150 mm diameter 12 mm thick
  • Scanning Tunneling Microscopy (STM)
  • Contact Mode, Tapping Mode and Phase Imaging
  • Magnetic Force Microscopy 
  • Electrostatic Force Microscopy
  • Nanomanipulation and Nanolithography
  • Stage movement x-y 150 mm with 2 micron resolution

AFM Probe

UCLA NanoLab DOES NOT provide AFM Probes. If you need probes, please contact one of the following vendors:

  • Applied Nanostructures
    • 415 Clyde Ave Suite 102, Mountain View, CA 94043
    • Phone: 650.988.9880
    • Fax: 408.516.4917
  • VEECO Probes
    • 5571 Ekwill Street, Goleta, CA 93111
    • Phone: 1.800.715.8440
    • Fax: 1.805.696.9003



Additional Information