Equipment Category – Measurement
Location: Engineering IV Site | Back to Equipment >>
The CDE ResMap has become an industry standard for cost effective resistivity measurement. Designed to meet the needs of process development and tool characterization engineers, this four point probe has the accuracy, repeatability and reliability required. Its large installed base is testimony to its performance and ease of use.
- Flexible and intuitive software
- All the input are editable and all the output files can be used easily by external tools.
- Wafer Size: 2″ to 8″