UCLA Nanolab
  • About Us
    • Contact
    • Personnel
    • Directions
  • Equipment
    • List
    • Backend
    • Chemical
    • Deposition
    • Etching
    • Lithography
    • Measurement
    • Thermal
    • Miscellaneous
    • Chemicals Inventory
  • Users
    • Become a user
    • Training
  • LabRunr
  • Partners
    • Advanced Light Microscopy and Spectroscopy Lab
    • The Center for High Frequency Electronics
    • Electron Imaging Center for NanoMachines
    • Integrated NanoMaterials Laboratory
    • Molecular Screening Shared Resource
    • UCLA Molecular Instrumentation Center
    • Nano & Pico Characterization Laboratory
    • NSF BioPACIFIC MIP
  • Calendar
    • Engineering Site Equipment Calendar
  • Publications
  • Home
Select Page

NanoLab Equipment

Equipment Category – Deposition

Deposition LPCVD Nitride/Poly/LTO – Reservations

Location: Engineering IV Site | Back to Equipment >>

Reserve equipment with LabRunr

For all reservations for LPCVD Deposition utilizing Nitride/Poly/LTO

Additional Information
  • Staff Contact
  • Brian Matthews
  • matthews@seas.ucla.edu
  • 310.206.5528
  • Tom Lee
  • leet@seas.ucla.edu
  • 310.206.4641
  • Trainings Required: 1

UCLA Nanolab

Engineering IV Site
420 Westwood Plaza
14-131A Engineering IV
Los Angeles, CA 90095
Tel: (310) 206-8923
Fax: (310) 206-0148
CNSI Site
570 Westwood Plaza
A216, California NanoSystems Institute
Los Angeles, CA 90095
Tel: (310) 863-3331

   Copyright © 2023 California NanoSystems Institute