NanoLab Equipment
Equipment Category – Deposition
Deposition LPCVD Nitride/Poly/LTO – Reservations
Location: Engineering IV Site | Back to Equipment >>
For all reservations for LPCVD Deposition utilizing Nitride/Poly/LTO
Additional Information
- Staff Contact
- Wilson Lin
- yousheng@seas.ucla.edu
- 310.206.8923
- Tom Lee
- leet@seas.ucla.edu
- 310.206.4641
- Trainings Required: 1