NanoLab Equipment
Equipment Category – Deposition
Deposition LPCVD Nitride Low Stress – Tystar -Tube 2
Location: Engineering IV Site | Back to Equipment >>
Deposition LPCVD Nitride Low Stress – Tystar -Tube 2
Additional Information
- Staff Contact
- Brian Matthews
- matthews@seas.ucla.edu
- 310.206.5528
- Tom Lee
- l33t@seas.ucla.edu
- 310.206.4641
- Trainings Required: 2