NanoLab Equipment
Equipment Category – Etching
FEI Nova NanoLab™ 600 DualBeam (FIB/SEM)
Location: Engineering IV Site | Back to Equipment >>
The NOVA 600 is a state-of-the-art nanofabrication tool used for TEM sample preparation, failure analyis applications and providing top-rate SEM imaging.
- Nova 600 Specification
- 1.1 nm SEM resolution
- 10 nm FIB resolution
- Pt, W and C Deposition
- 5-axis Stage with 150 nm Travel
- Wafer Handling up to 6″
Additional Information
- Noah Bodzin
- nbodzin@seas.ucla.edu
- 310.983.3312
- Yuwei Fan
- fan@cnsi.ucla.edu
- 310.983.3257
- Trainings Required: 2