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NanoLab Equipment

Equipment Category – Etching

FEI Nova NanoLab™ 600 DualBeam (FIB/SEM)

Location: Engineering IV Site | Back to Equipment >>

The NOVA 600 is a state-of-the-art nanofabrication tool used for TEM sample preparation, failure analyis applications and providing top-rate SEM imaging.

  • Nova 600 Specification
  • 1.1 nm SEM resolution
  • 10 nm FIB resolution
  • Pt, W and C Deposition
  • 5-axis Stage with 150 nm Travel
  • Wafer Handling up to 6″
Additional Information