Equipment Category – Backend

Loomis LSD-100

Location: CNSI Cleanroom   | Back to Equipment >>

The LSD-100 employs a “break wheel” that rolls over the length of a scribe line. The break wheel is shaped such that it places the wafer in three-point bending over an angled mandrel thereby applying tensile strain lateral to the scribe line. It is both the geometry of the wheel and the shape of the mandrel that control the strain placed on the scribe.
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