Equipment Category – Chemical
SemiTool Spin Rinse Dryer
Location: CNSI Site | Back to Equipment >>
Semiconductor wafers are fabricated in a clean environment. As electronic devices and chips get smaller and smaller particles become critical to ensure wafers yield good working chips. The semiconductor processing is a sequence of steps when chemicals are used either to add layers or remove layers, either fully or partially, and particles can be generated in these processes as well as from the external environment.
Before a semiconductor wafer starts the next processing step, it is essential that the wafers are as clean as possible and are perfectly dry before progressing through the line – this is the job of the spin rinse dryer.
Every part of the spin rinse dryer is designed to clean and keep wafers clean – washing away any loosely adhered particles.
- Staff Contact
- Brian Matthews
- Lorna Tokunaga
- Trainings Required: 1