NanoLab Equipment

UCLA Nanolab

Equipment Category – Chemical Processing/Wet Clean & Etch

Steel Solvent Wet Bench

Location: Engineering IV Site | Back to Equipment >>

Reserve equipment with LabRunr

Location: CNSI Site | Back to Equipment >>

Reserve equipment with labrunr
The NanoLab has multiple solvent wet benches in both Engineering IV and the CNSI. Please use the LabRunr links above to reserve a bench in either location.

Solvent Wet Benches are common in BEOL (Back End of Line) wet processing because at that stage of manufacturing, wafers have metal on them. Common acid chemistries used in FEOL processes can damage the BEOL structure, so solvents are popular BEOL cleaning chemicals.

Additional Information