Equipment Category –  Etching

STS AOE Oxide Etcher

Located in room 1129 of the Engineering V Building | Back to Equipment >>

Reserve equipment with LabRunr

STS AOE Oxide Etcher

Features

  • Flexible and intuitive software
  • All the input are editable and all the output files can be used easily by external tools.
  • Wafer Size: 2″ to 8″

 

 

Additional Information