NanoLab Equipment
Equipment Category – Etching
Ulvac NE-550 Chlorine Etcher
Location: CNSI Site | Back to Equipment >>
NE-550 is a multipurpose high-density, low-pressure plasma etching system with good uniformity and repeatability. The system is capable of etching many materials, including; III-V, metals, ceramics and optical materials.
Additional Information
- Staff Contact
- Tom Lee
- l33t@seas.ucla.edu
- 310.206.4641
- Brian Matthews
- matthews@seas.ucla.edu
- 310.206.5528
- Trainings Required: 2