NanoLab Equipment

Equipment Category – Measurement/

Veeco Dektak 8 Profilometer

Location: Engineering IV Site | Back to Equipment >>

The Dektak 8 is a contact profilometer capable of measuring vertical steps from tens of nanometers to 1mm in depth. Scan lengths of up to 50mm can be used on samples as large as 8” wafers.


  • Performs contact-based 2D or 3D topography measurement to characterize film thickness, roughness, stress and defects on samples up to 200mm.
  • Delivers 262 um vertical range with 1 Å vertical resolution at 6.55 um range
  • Has Step Height Repeatability of 7.5 Å step, 1 sigma
  • Allows Maximum sample thickness of 25.4mm
Additional Information