Tencor Flexus Stress Tester
Location: Engineering Cleanroom | Back to Equipment >>
The Flexus us a stress measurement instrument that measures the change in the radius of curvature of a wafer caused by the deposition of a thin film.
- Flexible and intuitive software
- All the input are editable and all the output files can be used easily by external tools.
- Wafer Size: 2″ to 8″