Location: Engineering IV Site | Back to Equipment >>

Location: CNSI Site | Back to Equipment >>

The Matrix System One Model 105 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper, setup for 4″ – 6″ wafers.

Features

• Model 105
• Configured for up to 6″ wafers
• Single wafer, single cassette
• Independent control of pressure, RF power, temperature, gas flow, & substrate position
• 600W RF water cooled generator
• Multi-step program (three steps + over etch) process program
• “Butterfly” Valve for more precise pressure control.
• Phase magnitude detector to provide real-time RF impedance matching control. 
• Two Mass Flow Controllers
• Vacuum Hose Assembly
• Range for Strip: 150C to 250C +/-5C
• Range for Descum: 70C to 150C +/-5C
• Wafer Lift Pin Assembly (up and down)