Equipment Category – Etching
Plasma Etch PE-100 Plasma System
Location: CNSI Site | Back to Equipment >>
The PE-100 is a complete plasma treatment solution capable of reactive ion etching, plasma functionalization, and more. This model is perfect for manufacturers, medical facilities, universities, research facilities, or any other company in need of a cost-effective, production-grade plasma processing solution.
The convenient chamber size, along with the availability of high frequency RF power, combine to create a production capable unit small enough to fit nearly anywhere in your lab or production work space.
Full laptop control enables enhanced consistency and complexity of recipes. PC automation also provides ease of use on the production floor.
- Location: Room A334 - Dry Etch
- Wilson Lin
- Lorna Tokunaga
- Trainings Required: 1