Porous silicon (PS) has gained wide-spread attention over the last decade for its interesting material properties, including nanometer features and extremely high specific surface area. Applications are, amongst others, humidity sensors, particle filters, optical elements and biochemical matrices. Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage. Most fabrication processes for macroporous silicon need illumination in addition, an issue also addressed by AMMTs tools for PS formation.