NanoLab Equipment

Equipment Category – Deposition

SCS PDS 2010 – Parylene Deposition Coater 

Parylene Deposition Process

Parylene coatings are applied at ambient temperatures with specialized vacuum deposition equipment. Parylene polymer deposition takes place at the molecular level, where films essentially ‘grow’ a molecule at a time:

  • A solid, granular raw material, called dimer, is heated under under vacuum and vaporized into a dimeric gas.
  • The gas is then pyrolized to cleave the dimer to its monomeric form.
  • In the room temperature deposition chamber, the monomer gas deposits on all surfaces as a thin, transparent polymer film.

Because Parylene is applied as a gas, the coating effortlessly penetrates crevices and tight areas on multi-layer components, providing complete and uniform encapsulation. Optimal thickness of the polymer coatings is determined based on the application and the coating properties desired. While Parylene coatings can range in thickness from hundreds of angstroms to several mils, a typical thickness is in the microns range.

Additional Information