The Fiji Thermal and Plasma ALD is a modular, high-vacuum ALD sytem that accommodates a wide range of deposition modes using a flexible architecture as well as multiple configurations of precursors and plasma gases. 

Features

• Provides both plasma and thermal atomic level deposition
• Intuitive interface to easily monitor and change recipes as needed
• Applied advanced computational fluid dynamics analyses to optimize Fiji reactor, heater and trap geometry
• Proprietary Chamber Turbo Pumpking System
• In-Situ ellipsometry and quartz crytal microbalance
• Integrated ozone