Equipment Category – Measurement
ULVAC UNECS-2000 Ellipsometer
Location: Engineering IV Site | Back to Equipment >>
The UNECS series of spectroscopic ellipsometers are used to measure the refractive index and thickness of thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement.
- High-speed Measurement : The snapshot measurement method is realized and the high-speed measurement is 20ms per point.
- Visible Spectral Range: The spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
- Compact Sensor Unit: The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.