The Verios 5 UC is a state-of-art scanning electron microscope offering sub-nanometer resolution from 1-30 KeV. It has a wide variety of detectors and imaging modes for high Z-contrast imaging including a solid-state retractable back-scatter electron detector.

• Drift compensated frame integration enabling the imaging of insulating materials without a conducting coating.
• 5 axis hybrid piezo/mechanical stage: 150 x 150 mm range can image 6” wafers
• Oxford Ultim Max 40 mm2 EDS detector with drift compensation