NanoLab Equipment

Equipment Category – Thermal

YES LPIII HMDS Thermal Oven

Location: CNSI Site | Back to Equipment >>

The YES Oven can be used to anneal samples up to 450° C in ambient atmosphere, vacuum, or with the user’s choice of 4 background gases. The lowest vacuum achievable under vacuum is approximately 50mT. Processes with background gas normally run between 150-300 Torr. The available gases are: Nitrogen, Oxygen, Argon, Forming Gas (5% Hydrogen in Nitrogen).
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