UCLA Nanolab
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Thermal Processing & Deposition

Equipment : Thermal Processing & Deposition

YES LPIII HMDS Thermal Oven

YES LPIII HMDS Thermal Oven

Tystar Therm Anneal

Tystar Therm Anneal

Carbolite High Temperature Oven

Carbolite High Temperature Oven

Modular Process Technology RTP 650

Modular Process Technology RTP 650

Modular Process Technology RTP-600xp

Modular Process Technology RTP-600xp

VWR-Vacuum Oven

VWR-Vacuum Oven

YES LPIII Vacuum Oven

YES LPIII Vacuum Oven

UCLA Nanolab

Engineering IV Site
420 Westwood Plaza
14-131A Engineering IV
Los Angeles, CA 90095
Tel: (310) 206-8923
Fax: (310) 206-0148
CNSI Site
570 Westwood Plaza
A216, California NanoSystems Institute
Los Angeles, CA 90095
Tel: (310) 863-3331

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