Polifab STS Multiplex CVD Deposition System

Polifab STS Multiplex CVD Deposition System

by | Jan 31, 2020 | 0 comments

NanoLab Equipment Equipment Category – Deposition STS Multiplex PECVD Deposition System Location: Engineering IV Site | Back to Equipment >> Reserve equipment with LabRunr The sts-CVD is a PECVD tool which deposits thin films such as oxide, nitride, Si...
Unaxis PECVD

Unaxis PECVD

by | Jan 31, 2020 | 0 comments

NanoLab Equipment Equipment Category – PECVD PECVD – Unaxis Location: Engineering IV Site | Back to Equipment >> Reserve equipment with LabRunr Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit...