by kbair | Jan 31, 2020 |
Equipment Category – Etching STS AOE Oxide Etcher Location: Engineering IV Site | Back to Equipment >> Reserve equipment with LabRunr STS AOE Oxide Etcher Features Flexible and intuitive software All the input are editable and all the output files can be...
by kbair | Jan 31, 2020 |
NanoLab Equipment Equipment Category – Deposition Fiji Thermal and Plasma Atomic Layer Deposition Location: Engineering IV Site | Back to Equipment >> Reserve equipment with LabRunr The Fiji Thermal and Plasma ALD is a modular, high-vacuum ALD sytem that...
by kbair | Jan 31, 2020 |
NanoLab Equipment Equipment Category – Deposition STS Multiplex PECVD Deposition System Location: Engineering IV Site | Back to Equipment >> Reserve equipment with LabRunr The sts-CVD is a PECVD tool which deposits thin films such as oxide, nitride, Si...
by kbair | Jan 31, 2020 |
NanoLab Equipment Equipment Category – PECVD PECVD – Unaxis Location: Engineering IV Site | Back to Equipment >> Reserve equipment with LabRunr Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit...
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