UCLA Nanolab
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Etching

Equipment : Etching

PlasmaTherm SLR 770 ICP – Chlorine Etcher

PlasmaTherm SLR 770 ICP – Chlorine Etcher

STS AOE Advanced Oxide Etcher

STS AOE Advanced Oxide Etcher

HF Vapor Etcher

HF Vapor Etcher

Matrix 105

Matrix 105

Oxford Plasmalab 80 Plus

Oxford Plasmalab 80 Plus

Plasma Etch PE-100 Plasma System

Plasma Etch PE-100 Plasma System

Plasma-Therm FDRIE DSE III

Plasma-Therm FDRIE DSE III

Porous Si Etcher

Porous Si Etcher

Technics Micro-RIE Series 800

Technics Micro-RIE Series 800

Tegal Plasmaline 515 Photoresist Asher

Tegal Plasmaline 515 Photoresist Asher

UCLA Nanolab

Engineering IV Site
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14-131A Engineering IV
Los Angeles, CA 90095
Tel: (310) 206-8923
Fax: (310) 206-0148
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570 Westwood Plaza
A216, California NanoSystems Institute
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